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Vacuum displacement table

The vacuum displacement table, combined with the selection of mechanisms and new materials, can operate normally in vacuum high and low temperature environments through new production processes and testing. It can also be customized according to special environments to make it resistant to radiation, mold, salt spray, corrosion and other high cleanliness environments.

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-技术特点-

★ Vacuum resistance 10 ⁻⁷ Pa

★ High and low temperature resistance -196~200 ℃

★ Radiation resistance of 10 ⁶ Gy

★ Customized according to various special environments

-性能参数-
产品型号HVRA100HVRA200HVRA300HVRA400
行程360°360°360°360°
台面尺寸Φ100mmΦ200mmΦ300mmΦ400mm
自重1.7kg7.9kg14kg21kg
重复定位精度0.005°0.005°0.005°0.005°
传动方式涡轮蜗杆(减速1/180)涡轮蜗杆(减速1/180)涡轮蜗杆(减速1/288)涡轮蜗杆(减速1/288)
导轨轴承轴承交叉滚子轴承交叉滚子轴承
最大速度20°/s25°/s12°/s5°/s
分辨率(无细分)0.01°0.01°0.00625°0.00625°
分辨率(20细分)0.0005°0.0005°0.0003125°0.0003125°
负载45kg60kg120kg120kg
端跳精度30μm40μm40μm40μm
偏心10μm20μm20μm30μm
标配电机42步进57步进57步进57步进