The vacuum servo motor is made of suitable new materials and manufactured through new production processes. It is strictly designed with frame numbers such as 40, 60, and 80 according to standards. It can also be customized according to special environments to make it resistant to radiation, mold, salt spray, corrosion, and other high-purity environments. The position feedback adopts a rotary transformer or a multi turn absolute encoder, which is widely used in semiconductor manufacturing, biomedicine, military and aerospace fields.